System: trichlorosilane/chlorosilane
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| 1) trichlorosilane |
| DECHEMA ID | 154 |
| Formula | Cl3HSi |
| Synonym | trichloromonosilane |
| Synonym | q1-2333 |
| Synonym | silicochloroform |
| InChi-Key | ZDHXKXAHOVTTAH-UHFFFAOYSA-N |
| Registry No. | 10025-78-2 |
| 2) chlorosilane |
| DECHEMA ID | 6559 |
| Formula | ClH3Si |
| Synonym | clorosilano |
| Synonym | un2985 |
| Synonym | monochlorosilane |
| Synonym | silyl chloride |
| Synonym | h3sicl |
| Synonym | silicon chloride hydride |
| Synonym | chlorosilicon |
| Synonym | einecs 236-705-7 |
| Synonym | mcs |
| InChi-Key | KOPOQZFJUQMUML-UHFFFAOYSA-N |
| Registry No. | 13465-78-6 |
Available physical property data:
| Property | Phase | No. of tables | No. of lines | Data |
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| no azeotrope under specified conditions | - | 1 | 1 | View |
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| vapor-liquid equilibrium | - | 1 | 1 | View |
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